STA-2200C-TSSG is an ultra-high temperature TSSG (top seed solution growth) furnace for growing SiC or Sapphire via flux solution at 2000 degrees. The furnace is heated by an induction coil with a 4" dia graphite crucible and an 8" dia. hermetic quartz chamber. Temperature is detected by a type C thermocouple and controlled by a Eurotherm 3000 series temperature controller. It also equips a precision pulling device with a minimum pulling rate of 0.6 mm/hr and a minimum rotation speed of 0.1 rpm. It can be operated under vacuum, inert gas flow, or reducing environment.
Specification:
Power | l 208 - 240VAC, three phases, 50/60Hz l 17 kW Max. A 60 A power panel is required. l 10 feet long 6/4 AWG UL-approved power cable is included. l The power plug is not included. |
Induction Heating System | l Max.Input Power: 15 KW l Output Frequency: 20 - 100 kHz l Duty Cycle: 100% l Induction Coil: 220 mm(ID) x 65mm(H) l Cooling: Water l Control mode: PID or manual l Protection: water flow interlock, over-temperature, and overpower protection |
Heating Chamber | l Quartz tube: φ216mm(OD) x φ206mm(ID) x 500mm(H) l Top flange: Special flange with one gas outlet and a pulling device. l Bottom flange: Special flange with a gas outlet, KF25 vacuum port, and 1/8" thermocouple feedthrough. l Vacuum port:KF25 port with a valve. l Max. vacuum level: 10-5 torr by turbopump |
Crucible and Thermal Insulation | l One high purity graphite crucible with a lid: Ø114 OD x Ø100 ID x 142 H (mm) l Max. effective capacity: 750 ml (The melt should be less than 2/3 of the max volume) l Thermal insulation layer: 45 mm-thick three-layer graphite felt l Note: the graphite felt and the crucible are consumable. Spare parts are available. l Crucible rotation (optional): graphite crucible can be rotated at 0.1 - 23 rpm for better temperature uniformity. |
Temperature Control | l Temp. Controller：Eurotherm 3000 series controller with +/- 0.1 °C accuracy with 28 programmable segments. l Heating rate:0~60ºC / min (suggestion at =< 5ºC) l Working Temperature:2000°C continuous (2200ºC less than 1 hr) l Thermocouple:1/8" type C thermocouple is placed against the bottom of the graphite surface. |
Pulling and Rotation Device | l The pulling device is high vacuum compatible with SS bellow. l Pulling rod:28 mm water-cooled SS rod l Alumina rod is available upon request l Pulling rate:0.8 - 50 mm/h (Slower speed is available upon request. Up to 0.06 mm/h) l Fast pulling rate:40 mm/min l Max Travel Distance:300 mm l Rotation Speed:0.1-23 rpm (Slower speed is available upon request up to 0.03 rpm) l Optional recirculating water chiller for cooling seed rod: |
Control Panel | l 7" touch screen control panel for programming all parameters ① Temperature programs ② Seed rod rotation speed ③ Pulling speed ④ Store up to 5 recipes. |
Vacuum Pump | l A vacuum pump or pumping station is recommended but not included. l Vacuum level: ① 10-2 torr via a mechanical pump ② 10-5 torr via a turbopump |
Water Chiller | l A 50 L./min water chiller is required but not included. |
Dimension | l 1173L×1190W×2070H (mm) |
Weight | l 200 kg |
Warranty | l One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty) |
Specification:
Power | l 208 - 240VAC, three phases, 50/60Hz l 17 kW Max. A 60 A power panel is required. l 10 feet long 6/4 AWG UL-approved power cable is included. l The power plug is not included. |
Induction Heating System | l Max.Input Power: 15 KW l Output Frequency: 20 - 100 kHz l Duty Cycle: 100% l Induction Coil: 220 mm(ID) x 65mm(H) l Cooling: Water l Control mode: PID or manual l Protection: water flow interlock, over-temperature, and overpower protection |
Heating Chamber | l Quartz tube: φ216mm(OD) x φ206mm(ID) x 500mm(H) l Top flange: Special flange with one gas outlet and a pulling device. l Bottom flange: Special flange with a gas outlet, KF25 vacuum port, and 1/8" thermocouple feedthrough. l Vacuum port:KF25 port with a valve. l Max. vacuum level: 10-5 torr by turbopump |
Crucible and Thermal Insulation | l One high purity graphite crucible with a lid: Ø114 OD x Ø100 ID x 142 H (mm) l Max. effective capacity: 750 ml (The melt should be less than 2/3 of the max volume) l Thermal insulation layer: 45 mm-thick three-layer graphite felt l Note: the graphite felt and the crucible are consumable. Spare parts are available. l Crucible rotation (optional): graphite crucible can be rotated at 0.1 - 23 rpm for better temperature uniformity. |
Temperature Control | l Temp. Controller：Eurotherm 3000 series controller with +/- 0.1 °C accuracy with 28 programmable segments. l Heating rate:0~60ºC / min (suggestion at =< 5ºC) l Working Temperature:2000°C continuous (2200ºC less than 1 hr) l Thermocouple:1/8" type C thermocouple is placed against the bottom of the graphite surface. |
Pulling and Rotation Device | l The pulling device is high vacuum compatible with SS bellow. l Pulling rod:28 mm water-cooled SS rod l Alumina rod is available upon request l Pulling rate:0.8 - 50 mm/h (Slower speed is available upon request. Up to 0.06 mm/h) l Fast pulling rate:40 mm/min l Max Travel Distance:300 mm l Rotation Speed:0.1-23 rpm (Slower speed is available upon request up to 0.03 rpm) l Optional recirculating water chiller for cooling seed rod: |
Control Panel | l 7" touch screen control panel for programming all parameters ① Temperature programs ② Seed rod rotation speed ③ Pulling speed ④ Store up to 5 recipes. |
Vacuum Pump | l A vacuum pump or pumping station is recommended but not included. l Vacuum level: ① 10-2 torr via a mechanical pump ② 10-5 torr via a turbopump |
Water Chiller | l A 50 L./min water chiller is required but not included. |
Dimension | l 1173L×1190W×2070H (mm) |
Weight | l 200 kg |
Warranty | l One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty) |
